Company Filing History:
Years Active: 2020-2025
Title: Tomohito Ura: Innovator in Substrate Processing Technology
Introduction
Tomohito Ura is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His innovative work focuses on improving methods and apparatuses for drying substrates, which are crucial in various manufacturing processes.
Latest Patents
Ura's latest patents include advanced substrate processing apparatuses and methods. One of his notable inventions is a substrate processing apparatus designed to dry a substrate by substituting a liquid film of a drying liquid with a supercritical fluid. This apparatus features a pressure container that accommodates the substrate, a discharge line for fluid discharge, a depressurizing valve, and a concentration measurement part that measures the vapor concentration of the drying liquid. Another significant patent involves a substrate processing apparatus that utilizes a supercritical fluid to dry a substrate with a liquid film on its pattern formation surface. This invention includes a processing vessel, a substrate holder, a first detector for inclination detection, a posture adjusting device, and a controller for horizontal leveling.
Career Highlights
Tomohito Ura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop and refine his innovative technologies, contributing to advancements in substrate processing.
Collaborations
Ura has collaborated with notable colleagues such as Shogo Fukui and Masataka Gosho. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies in substrate processing.
Conclusion
Tomohito Ura's contributions to substrate processing technology highlight his role as an influential inventor in the field. His innovative patents and collaborations continue to shape advancements in manufacturing processes.