Tomoharu Shimada

Title: Innovations by Tomoharu Shimada in Heat Treatment Technology

Introduction

Tomoharu Shimada, an accomplished inventor based in Komatsu, Japan, has made significant contributions to the field of heat treatment technology. With a total of three patents to his name, Shimada has focused on developing innovative solutions that enhance the manufacturing process for substrates and semiconductor devices. His work emphasizes precision and quality, aiming to reduce potential issues that arise during heat treatment.

Latest Patents

Two of Shimada's latest patents include a "Heat Treatment Apparatus and Method of Manufacturing Substrates" and a "Thermal Treatment Apparatus, Method for Manufacturing Semiconductor Device, and Method for Manufacturing Substrate." The first patent introduces a heat treatment apparatus designed with an accurately positioned nozzle on an adaptor to minimize interference with other components and reduce the risk of breakage due to thermal expansion. This apparatus features a reaction tube for substrate treatment, a quartz adaptor for support, and a heater for effective heating.

His second patent addresses challenges in the semiconductor manufacturing process, focusing on reducing slip dislocation during heat treatment. This thermal treatment apparatus includes a substrate support that minimizes deformation, ensuring that high-quality semiconductor devices can be achieved. The supporting portion is made of silicon and features a silicon carbide-coated surface to enhance durability.

Career Highlights

Shimada has built a reputable career at Hitachi Kokusai Electric Inc., where he has honed his expertise in heat treatment technologies. His innovative approaches have contributed to the company's advancement in semiconductor manufacturing and substrate processing.

Collaborations

Throughout his career, Tomoharu has collaborated with notable coworkers, including Naoto Nakamura and Iwao Nakamura. Their collective efforts in research and development have bolstered the company's position in the industry and led to successful technological advancements.

Conclusion

Tomoharu Shimada's contributions to heat treatment technology through his patents underscore his role as a vital inventor in the semiconductor manufacturing field. His innovative apparatuses and methods exemplify the ongoing commitment to improving processes and ensuring high-quality outcomes in substrate and semiconductor device fabrication.