The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Sep. 15, 2005
Tomoharu Shimada, Komatsu, JP;
Akira Morohashi, Utsunomiya, JP;
Kojiro Yokozawa, Toyama, JP;
Keishin Yamazaki, Takaoka, JP;
Tomoharu Shimada, Komatsu, JP;
Akira Morohashi, Utsunomiya, JP;
Kojiro Yokozawa, Toyama, JP;
Keishin Yamazaki, Takaoka, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
A heat treatment apparatus wherein a nozzle is accurately provided on an adaptor to prevent the nozzle from interfering with other part items and a possibility of breakage due to heat expansion of the nozzle can be reduced. The heat treatment apparatus () is provided with a reaction tube () for treating a substrate (), a quartz adaptor () for supporting the reaction tube (), a nozzle () connected to the adaptor () for supplying a treatment gas into the reaction tube (), and a heater () provided outside the reaction tube () for heating inside the reaction tube (). The nozzle () is connected to an upper plane of the adaptor () in the reaction tube () at least a part which is of the nozzle () and is connected with the adaptor () is made of quartz and other nozzle parts are made of silicon carbide.