Company Filing History:
Years Active: 2010-2014
Title: Tomoharu Obuki: Innovator in Semiconductor Inspection Technology
Introduction
Tomoharu Obuki is a prominent inventor based in Hitachinaka, Japan. He has made significant contributions to the field of semiconductor inspection technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and accuracy of inspection devices used in semiconductor analysis.
Latest Patents
One of Obuki's latest patents is an inspection device designed to prevent electric discharge, allowing for more efficient detection of absorbed current. This invention features absorbed current detectors mounted in a vacuum specimen chamber, with reduced capacitance in the signal wire to detect high-frequency absorbed current signals. The device includes signal selectors operated by a signal selection controller, enabling electrical connection between the semiconductor parameters analyzer and the probes in contact with the sample. This innovation allows for the measurement of electrical characteristics without limitations on signal paths.
Another notable patent involves specimen inspection equipment that generates clear absorbed current images. This invention utilizes multiple probes in contact with a specimen while irradiating it with an electron beam. The currents flowing in the probes are measured, and signals from at least two probes are input to a differential amplifier. The output is amplified, and based on this output and the scanning information of the electron beam, a clear absorbed current image is produced. This advancement significantly improves measurement efficiency in the failure analysis of semiconductor devices.
Career Highlights
Tomoharu Obuki is currently employed at Hitachi High-Technologies Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing inspection methods and enhancing the reliability of semiconductor devices.
Collaborations
Obuki has collaborated with notable colleagues, including Yasuhiko Nara and Hiroshi Toyama, contributing to various projects that push the boundaries of semiconductor inspection technology.
Conclusion
Tomoharu Obuki's contributions to semiconductor inspection technology through his innovative patents have significantly impacted the industry. His work continues to pave the way for advancements in the field, ensuring more efficient and accurate analysis of semiconductor devices.
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