The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Jul. 29, 2009
Mitsuhiro Nakamura, Hitachinaka, JP;
Hiroshi Toyama, Hachioji, JP;
Yasuhiko Nara, Hitachinaka, JP;
Katsuo Oki, Kasama, JP;
Tomoharu Obuki, Hitachinaka, JP;
Masahiro Sasajima, Hitachinaka, JP;
Mitsuhiro Nakamura, Hitachinaka, JP;
Hiroshi Toyama, Hachioji, JP;
Yasuhiko Nara, Hitachinaka, JP;
Katsuo Oki, Kasama, JP;
Tomoharu Obuki, Hitachinaka, JP;
Masahiro Sasajima, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the invention is to provide an inspection device which has a function of preventing electric discharge so that an absorbed current is detected more efficiently. In the invention, absorbed current detectors are mounted in a vacuum specimen chamber and capacitance of a signal wire from each probe to corresponding one of the absorbed current detectors is reduced to the order of pF so that even an absorbed current signal with a high frequency of tens of kHz or higher can be detected. Moreover, signal selectors are operated by a signal selection controller so that signal lines of a semiconductor parameters analyzer are electrically connected to the probes brought into contact with a sample. Accordingly, electrical characteristics of the sample can be measured without limitation of signal paths connected to the probes to transmission of an absorbed current. In addition, a resistance for slow leakage of electric charge is provided in each probe stage or a sample stage.