Nirasaki, Japan

Tomihiro Yonenaga


Average Co-Inventor Count = 2.8

ph-index = 5

Forward Citations = 363(Granted Patents)


Location History:

  • Yamanashi, JP (1994)
  • Yamanashi-ken, JP (1996 - 1998)
  • Futaba-Cho, JP (1999)
  • Kitakoma-gun, JP (2002)
  • Nirasaki, JP (2010 - 2017)

Company Filing History:


Years Active: 1994-2017

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9 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Tomihiro Yonenaga

Introduction

Tomihiro Yonenaga is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of heat treatment technology, holding a total of nine patents. His work focuses on improving the efficiency and effectiveness of heat treatment processes for various substrates.

Latest Patents

Yonenaga's latest patents include a heat treatment apparatus designed to perform heat treatment on multiple substrates simultaneously. This apparatus features a processing vessel that accommodates the substrates, an electromagnetic induction source that generates a high-frequency oscillating magnetic field, and a substrate holding element with heating elements made of conductive material. This innovative design allows for efficient heat generation through induced currents. Another notable patent involves a heat treatment apparatus that controls temperature uniformity when heating substrates on susceptors. This system includes a reaction tube for wafer treatment, conductive susceptors, a rotatable quartz boat, and a magnetic field generating unit that inductively heats the susceptors while maintaining precise temperature control.

Career Highlights

Throughout his career, Yonenaga has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kabushiki Kaisha. His experience in these organizations has contributed to his expertise in developing advanced heat treatment technologies.

Collaborations

Yonenaga has collaborated with talented individuals such as Sumi Tanaka and Yumiko Kawano. These partnerships have fostered innovation and the exchange of ideas in the field of heat treatment technology.

Conclusion

Tomihiro Yonenaga's contributions to heat treatment technology through his patents and collaborations highlight his role as a significant inventor in the industry. His innovative approaches continue to influence advancements in the field.

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