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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9750087 B1

PDFFull Text
Expired
Date of Patent:
Aug. 29, 2017

Filed:

Mar. 23, 2015

Heat treatment apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Tomihiro Yonenaga, Nirasaki, JP;

Yumiko Kawano, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

David Angwin

Assistant Examiner:

Gyounghyun Bae

Int. Cl.
CPC ...
H05B 6/10 (2006.01); H05B 6/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05B 6/105 (2013.01); H01L 21/67103 (2013.01); H01L 21/67115 (2013.01); Y10T 29/49826 (2015.01); Y10T 156/10 (2015.01);
Abstract

A heat treatment apparatus configured to perform a heat treatment on a plurality of substrates, including: a processing vessel configured to accommodate the plurality of substrates on which the heat treatment is performed; an electromagnetic induction source configured to generate an oscillating magnetic field having a high frequency within the processing vessel; and a substrate holding element having a plurality of heating elements arranged in a vertical direction and spacers interposed between the adjacent heating elements, the heating element being made of a conductive material and allowing an induced current caused by the oscillating magnetic field to flow therein to generate heat, the substrate holding element supporting the substrates in a state where the substrates are mounted on the heating elements.

Find Patent Forward Citations

Yonenaga, Tomihiro. (2017). Heat treatment apparatus (U.S. Patent No. 9750087). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9750087

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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