Tom Tseng

Title: The Innovative Contributions of Tom Tseng

Introduction

Tom Tseng is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent. His work is recognized for its impact on the efficiency and precision of ion implantation processes.

Latest Patents

Tom Tseng holds a patent for a "Method of monitoring high tilt angle of medium current implant." This method involves monitoring and adjusting the position of a wafer in relation to an ion beam. The process includes setting the wafer holder's position to achieve a tilt angle of 45 degrees and a twist angle of 45 degrees concerning the ion beam's path. The method also entails implanting boron species into the wafer at a specific energy level and dose, while periodically measuring the sheet resistivity to ensure optimal performance.

Career Highlights

Tom Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in ion implantation techniques has contributed to advancements in semiconductor manufacturing processes. His innovative approach has helped improve the quality and efficiency of wafer processing.

Collaborations

Tom has collaborated with esteemed colleagues, including Hung-Ta Huang and Hsueh-Li Sun. Their teamwork has fostered an environment of innovation and excellence within their projects.

Conclusion

Tom Tseng's contributions to semiconductor technology through his patent and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the field. His methods continue to influence the industry, showcasing the importance of innovation in technology.