Tom Tillery

Title: Tom Tillery: Innovator in Semiconductor Technology

Introduction

Tom Tillery is a notable inventor based in Phoenix, AZ (US), recognized for his contributions to semiconductor technology. He holds 2 patents that showcase his innovative approaches in the field. His work has significantly impacted the methods used in semiconductor processing.

Latest Patents

One of Tom Tillery's latest patents is titled "Method for high aspect ratio photoresist removal in pure reducing plasma." This patent discloses a method for removing photoresist and oxidation layers from semiconductor substrates. The process involves placing a substrate in a processing chamber, which is separate from a plasma chamber that generates a non-oxidizing plasma. The method includes generating a first non-oxidizing plasma from a reactant gas and a carrier gas, with specific flow rates for each gas. The substrate is then treated by exposing it to this non-oxidizing plasma in the processing chamber.

Career Highlights

Throughout his career, Tom Tillery has worked with several prominent companies in the semiconductor industry. Notable among these are Mattson Technology, Inc. and Beijing E-Town Semiconductor Technology Co., Ltd. His experience in these organizations has contributed to his expertise and innovative capabilities in semiconductor processing.

Collaborations

Tom has collaborated with various professionals in his field, including Li Diao and Robert George Elliston. These collaborations have likely enriched his work and led to advancements in semiconductor technology.

Conclusion

Tom Tillery is a distinguished inventor whose work in semiconductor technology has led to significant advancements. His patents reflect his innovative spirit and dedication to improving semiconductor processing methods. His contributions continue to influence the industry positively.