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Phoenix, AZ, United States of America

Tom Tillery

USPTO Granted Patents = 2

Average Co-Inventor Count = 8.0

ph-index = 1

Forward Citations = 2(Granted Patents)

Company Filing History:

Mattson Technology, Inc

Beijing E-town Semiconductor Technology, Co., Ltd

where one patent can have more than one assignee

Years Active: 2019-2021

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2 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11107693 - Method for high aspect ratio photoresist removal in pure reducing plasma (2021-08-31),

2. 10431469 - Method for high aspect ratio photoresist removal in pure reducing plasma (2019-10-01),

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