Yilan, Taiwan

Ting-Hau Wu


Average Co-Inventor Count = 3.5

ph-index = 4

Forward Citations = 174(Granted Patents)


Location History:

  • Yilan County, TW (2014)
  • Yilan, TW (2011 - 2021)

Company Filing History:


Years Active: 2011-2021

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32 patents (USPTO):

Title: Innovations of Ting-Hau Wu in MEMS Technology

Introduction: Ting-Hau Wu, based in Yilan, Taiwan, is a prominent inventor known for his significant contributions to the field of Micro-Electro-Mechanical Systems (MEMS). With a remarkable portfolio of 32 patents, he has established himself as a leading figure in the development of advanced MEMS devices and fabrication methods.

Latest Patents: Wu's latest innovations include two key patents focused on MEMS devices and methods of fabrication. The first patent outlines a MEMS device comprising a bottom alloy layer on a substrate, an inner material layer, and a top alloy layer. These layers, which include an alloy of at least two metals and nitrogen, collectively form a MEMS feature. The second patent details MEMS structures and methods utilizing a locker film that provides essential support during the release of moveable mass regions from surrounding substrates. This innovative approach minimizes undesired movements and prevents etching of the moveable mass sidewalls, enhancing the reliability of MEMS devices.

Career Highlights: Ting-Hau Wu has made a significant impact at Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in MEMS technology. His inventions have not only advanced the capabilities of MEMS devices but have also contributed to the growth of the semiconductor industry. His extensive patent portfolio showcases his relentless pursuit of technological advancement.

Collaborations: Throughout his career, Wu has collaborated with notable colleagues such as Chun-Ren Cheng and Shang-Ying Tsai. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas, leading to groundbreaking advancements in MEMS technology.

Conclusion: Ting-Hau Wu's contributions to MEMS technology and his impressive array of patents underscore his role as a pioneer in the field. His work continues to influence the development of semiconductor technologies, paving the way for future innovations. As he progresses in his career, the industry eagerly anticipates the next breakthroughs from this exceptional inventor.

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