Company Filing History:
Years Active: 2018
Title: Tim Groothuijsen: Innovator in Vibration-Compensated Optical Systems
Introduction
Tim Groothuijsen is a notable inventor based in Eindhoven, Netherlands. He has made significant contributions to the field of optical systems, particularly in lithography apparatus. His innovative work has led to the development of a unique patent that addresses critical challenges in the industry.
Latest Patents
Tim Groothuijsen holds a patent for a "Vibration-compensated optical system, lithography apparatus and method." This invention features an optical element, a carrying element, and an actuator that actuates the optical element relative to the carrying element. The system includes a first elastic element that directly couples the optical element to the carrying element, a reaction mass, and a second elastic element. The actuator connects the optical element to the reaction mass, while the second elastic element couples the reaction mass to the carrying element. The design ensures optimal performance by maintaining stability and precision in lithography applications.
Career Highlights
Tim Groothuijsen is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and lithography technology. His role at the company allows him to further develop and refine his innovative ideas, contributing to advancements in the industry.
Collaborations
Tim collaborates with Yim-Bun Patrick Kwan, a fellow innovator in the field. Their partnership enhances the potential for groundbreaking developments in optical systems.
Conclusion
Tim Groothuijsen's work in vibration-compensated optical systems exemplifies the innovative spirit of modern inventors. His contributions to lithography technology are paving the way for future advancements in the field.