The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Aug. 15, 2016
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Yim-Bun Patrick Kwan, Oberkochen, DE;
Tim Groothuijsen, Eindhoven, NL;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A vibration-compensated optical system for a lithography apparatus includes an optical element, a carrying element, an actuator for actuating the optical element relative to the carrying element, a first elastic element which directly couples the optical element to the carrying element, a reaction mass, and a second elastic element. The actuator couples the optical element to the reaction mass. The second elastic element directly couples the reaction mass to the carrying element. For a mass (m) of the optical element, a stiffness (k) of the first elastic element, a mass (m) of the reaction mass and a stiffness (k) of the second elastic element the following holds true: