Carl Zeiss Smt Gmbh

Tim Groothuijsen

Yim-Bun Patrick Kwan

A vibration-compensated optical system for a lithography apparatus includes an optical element, a carrying element, an actuator for actuating the optical element relative to the carrying element, a first elastic element which directly couples the optical element to the carrying element, a reaction mass, and a second elastic element. The actuator couples the optical element to the reaction mass. The second elastic element directly couples the reaction mass to the carrying element. For a mass (m) of the optical element, a stiffness (k) of the first elastic element, a mass (m) of the reaction mass and a stiffness (k) of the second elastic element the following holds true: 

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Eindhoven, Netherlands

Tim Groothuijsen