Company Filing History:
Years Active: 2018
Title: Tilmann Assmus: Innovator in EUV Lithography Mirror Technology
Introduction
Tilmann Assmus is an accomplished inventor based in Aalen, Germany, recognized for his significant contributions to the field of EUV lithography. With a patent under his name, Assmus has made impactful advancements in mirror technology, particularly in the area of surface correction.
Latest Patents
Assmus holds a patent for "Surface correction of mirrors with decoupling coating." This innovative mirror system is specifically designed for EUV lithography and comprises a substrate and a reflective coating. The remarkable feature of the reflective coating is its dual-layer structure. The first group of layers reflects radiation in the wavelength range of 5 nm to 30 nm, while a decoupling coating is strategically placed to prevent this radiation from affecting the first group of layers. This design not only enhances the performance of the mirror but also includes a correction layer that varies in thickness to fine-tune the surface form, ensuring optimal functionality for EUV applications.
Career Highlights
Tilmann Assmus currently works at Carl Zeiss SMT GmbH, a renowned company in the optical and photonic systems industry. His role at the company has allowed him to leverage his expertise in materials science to spearhead innovative projects that advance lithography technologies.
Collaborations
Throughout his career, Assmus has collaborated with talented individuals, including coworkers Oliver Dier and Tobias Hackl. These partnerships have been instrumental in driving forward the development of new technologies and refining existing ones in the field of lithography.
Conclusion
Tilmann Assmus stands out as a pivotal figure in the realm of EUV lithography through his innovative mirror technology. His patent highlights not only his technical ingenuity but also his commitment to enhancing the capabilities of photonic systems. As the field of lithography continues to evolve, contributions like those of Assmus will undoubtedly play a crucial role in shaping its future.