Tighe A Spurlin

USPTO Granted Patents = 11 (Patent Applications = 11)

Average Co-Inventor Count = 4.2

ph-index = 3

Forward Citations = 28(Granted Patents)

Company Filing History:

6 out of 3,768

Lam Research Corporation

patents

5 out of 993

Novellus Systems Incorporated

patents

Years Active: 2015-2022

where 'Filed Patents' based on already Granted Patents

11 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11280022 - Removal of electroplating bath additives (2022-03-22),

2. 11208732 - Monitoring surface oxide on seed layers during electroplating (2021-12-28),

3. 10745817 - Configuration and method of operation of an electrodeposition system for improved process stability and performance (2020-08-18),

4. 10711366 - Removal of electroplating bath additives (2020-07-14),

5. 10443146 - Monitoring surface oxide on seed layers during electroplating (2019-10-15),

6. 9865501 - Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer (2018-01-09),

7. 9816196 - Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte (2017-11-14),

8. 9816193 - Configuration and method of operation of an electrodeposition system for improved process stability and performance (2017-11-14),

9. 9472377 - Method and apparatus for characterizing metal oxide reduction (2016-10-18),

10. 9385035 - Current ramping and current pulsing entry of substrates for electroplating (2016-07-05),

11. 9070750 - Methods for reducing metal oxide surfaces to modified metal surfaces using a gaseous reducing environment (2015-06-30),

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11 patents pending:

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