The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Jan. 07, 2013
Novellus Systems, Inc., Fremont, CA (US);
Tighe A. Spurlin, Portland, OR (US);
Jian Zhou, West Linn, OR (US);
Edward C. Opocensky, Aloha, OR (US);
Jonathan Reid, Sherwood, OR (US);
Steven T. Mayer, Aurora, OR (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
In some method and apparatus disclosed herein, the profile of current delivered to the substrate provides a relatively uniform current density on the substrate surface during immersion. These methods include controlling the current density applied across a substrate's surface during immersion by dynamically controlling the current to account for the changing substrate surface area in contact with electrolyte during immersion. In some cases, current density pulses and/or steps are used during immersion, as well.