Jian Zhou

Title: Jian Zhou: Innovator in Electroplating Solutions

Introduction

Jian Zhou is a prominent inventor based in West Linn, OR (US), known for his contributions to the field of electroplating. With a total of 6 patents to his name, Zhou has made significant advancements in methods that enhance the efficiency and effectiveness of electroplating processes.

Latest Patents

One of his latest patents focuses on low copper electroplating solutions for fill and defect control. This innovation relates to a method of electroplating copper into damascene features using a low copper concentration electrolyte, which contains less than about 10 g/L copper ions and about 2-15 g/L acid. The use of this low copper electrolyte results in a relatively high overpotential on the plating substrate surface, allowing for a slow plating process with minimal fill defects. Additionally, the low copper electrolyte may exhibit a relatively high cloud point.

Another significant patent by Zhou addresses the control of electrolyte flow dynamics for uniform electroplating. This invention improves the uniformity of electroplating a metal, such as copper, on a semiconductor wafer by utilizing an electroplating apparatus equipped with a flow-shaping element. This element is positioned near the semiconductor wafer and is made of a resistive material. It features two types of non-communicating channels that transport the electrolyte towards the substrate, enhancing the overall electroplating process.

Career Highlights

Throughout his career, Jian Zhou has worked with notable companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. His experience in these organizations has contributed to his expertise in electroplating technologies.

Collaborations

Zhou has collaborated with several professionals in his field, including Jonathan David Reid and Zhian He. These collaborations have likely fostered innovation and the exchange of ideas, further enhancing the advancements in electroplating solutions.

Conclusion

Jian Zhou's work in electroplating solutions has made a significant impact on the industry, showcasing his innovative spirit and dedication to improving manufacturing processes. His patents reflect a commitment to advancing technology in electroplating, making him a noteworthy figure in the field.