Thomas Krücken

Title: Thomas Krücken: Innovator in CVD Reactor Technology

Introduction

Thomas Krücken is a notable inventor based in Aachen, Germany. He has made significant contributions to the field of chemical vapor deposition (CVD) technology. With a total of 4 patents, his work focuses on improving processes and equipment used in semiconductor manufacturing.

Latest Patents

One of Krücken's latest patents is a gas distributor for a CVD reactor. This innovative gas distributor features two separate gas distribution chambers, each capable of receiving a process gas through an infeed opening. The design includes a gas distribution device in a top layer that is flow-connected to connecting channels in a bottom layer. These connecting channels are strategically arranged to allow gas outlet openings for the process gases to escape. Each gas distribution device has a distribution section connected to multiple sub-distribution sections, ensuring efficient gas flow.

Another significant patent is related to a MOCVD layer growth method with a subsequent multi-stage cleaning step. This method involves depositing layers on substrates within a process chamber using a carbon-containing gaseous source material. During the layer growth, parasitic coatings form on the chamber walls. After the substrates are removed, a gas flow containing cleaning gases is introduced, and the chamber is heated to a cleaning temperature. This process transforms the parasitic coatings into volatile substances, which are then evacuated from the chamber. An ammonia cleaning step is also performed to eliminate carbon-containing residues, enhancing the overall efficiency of the process.

Career Highlights

Throughout his career, Thomas Krücken has worked with prominent companies such as Aixtron SE and Philips Intellectual Property & Standards GmbH. His experience in these organizations has allowed him to refine his expertise in CVD technology and patent development.

Collaborations

Krücken has collaborated with several professionals in his field, including Baskar Pagadala Gopi and Martin Dauelsberg. These collaborations have contributed to the advancement of his innovative projects and patents.

Conclusion

Thomas Krücken is a distinguished inventor whose work in CVD technology has led to significant advancements in the field. His patents reflect a commitment to improving manufacturing processes, and his collaborations further enhance his contributions to innovation.