The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2014
Filed:
Jun. 06, 2006
Applicants:
Gunther Hans Derra, Aachen, DE;
Thomas Krucken, Aachen, DE;
Inventors:
Gunther Hans Derra, Aachen, DE;
Thomas Krucken, Aachen, DE;
Assignee:
Koninklijke Philips N.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B60R 1/06 (2006.01); G03B 27/54 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70916 (2013.01); G03F 7/70933 (2013.01); G03F 7/70883 (2013.01); G03F 7/70908 (2013.01);
Abstract
A debris mitigation system for use in a radiation unit for EUV radiation and/or X-rays, for example, includes a foil trap having several passages allowing a straight passage of radiation, and one or several feed pipes for gas supply of buffer gas to the foil trap. The foil trap has an interior space extending over several of the passages, where the feed pipes open into the interior space.