Company Filing History:
Years Active: 1994-2000
Title: Thomas G Mallon: Innovator in Semiconductor Technology
Introduction
Thomas G Mallon is a prominent inventor based in Santa Clara, CA, known for his significant contributions to semiconductor technology. With a total of 11 patents, he has made remarkable advancements in the field, particularly in methods related to integrated circuit processing.
Latest Patents
Mallon’s latest patents include innovative methods for adjusting the density of lines and contact openings across semiconductor materials. One notable patent discloses the formation of additional lines, either dummy or active, in an electrically conductive pattern to ensure uniform loading during etching or chemical/mechanical polishing. This method also introduces the use of additional vias to balance loading during etching, providing stress relief for underlying metal in low-density regions. Another significant patent involves a semiconductor integrated circuit processing wafer made through plasma enhanced chemical vapor deposition (PECVD). This process addresses non-uniform thicknesses of material layers, ensuring a substantially uniform thickness across the wafer.
Career Highlights
Throughout his career, Thomas G Mallon has worked with notable companies such as LSI Logic Corporation and Lam Research Corporation. His experience in these organizations has allowed him to refine his expertise in semiconductor processing and innovation.
Collaborations
Mallon has collaborated with esteemed colleagues, including Nicholas F Pasch and Mark A Franklin, contributing to various projects that have advanced semiconductor technology.
Conclusion
Thomas G Mallon stands out as a key figure in the semiconductor industry, with a strong portfolio of patents that reflect his innovative spirit and technical expertise. His work continues to influence the development of advanced semiconductor technologies.