Company Filing History:
Years Active: 1980-1988
Title: Innovations of Thomas A. Hansen
Introduction
Thomas A. Hansen is a notable inventor based in Poughkeepsie, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work primarily focuses on processes that enhance the efficiency and effectiveness of semiconductor materials.
Latest Patents
One of Hansen's latest patents is the RIE process for etching silicon isolation trenches and polycides. This innovative process involves etching semiconductor materials with a high etch rate against an insulator mask using a unique etchant gas mixture. The mixture includes chlorocarbon compounds, SF6, O2, and an inert gas like helium. The preferred gas mixture has a 2/1 ratio of chlorocarbon to SF6, with specific percentages of each component to achieve optimal etching conditions. The etch rate of silicon against an oxide mask is notably high, ranging from 30 to 40. An impressive aspect of this process is the ability to control the shape of trenches by adjusting the RIE system power.
Another significant patent by Hansen involves the use of metal silicide contacts in boron lightly doped P^- type silicon. This invention replaces the traditional P^+ implanted or diffused channel stoppers with metal silicide contacts, particularly in polyimide filled deep trench isolated integrated circuits. The trench sidewalls are coated with an insulating material, which is removed during the contact etch step, allowing the formation of Pt-Si at the trench bottoms simultaneously with device contacts.
Career Highlights
Hansen's career is marked by his association with IBM, where he has contributed to various innovative projects in semiconductor technology. His expertise and inventions have played a crucial role in advancing the capabilities of integrated circuits.
Collaborations
Throughout his career, Hansen has collaborated with notable colleagues, including George R. Goth and Robert T. Villetto, Jr. These collaborations have further enriched his work and contributed to the development of groundbreaking technologies.
Conclusion
Thomas A. Hansen's contributions to semiconductor technology through his patents and innovative processes have significantly impacted the industry. His work continues to influence advancements in integrated circuits and semiconductor materials.
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