This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Varian Semiconductor Equipment Associates, Inc.. Active years: 2010-2011.
Company Filing History:
Years Active: 2010-2011
Title: Thirumal Thanigaivelan: Innovator in Semiconductor Technology
Introduction
Thirumal Thanigaivelan is a notable inventor based in North Andover, MA (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to improving semiconductor device performance.
Latest Patents
Thanigaivelan's latest patents include an "Optimized halo or pocket cold implants" method. This invention discloses an improved technique for performing pocket or halo implants, which reduces damage and defects that can degrade semiconductor device performance. By conducting the halo or pocket implant at cold temperatures, the method minimizes damage to the crystalline structure and enhances the amorphization of the crystal. Additionally, this approach allows for the use of lighter elements, such as boron or phosphorus, in the halo implant process.
Another significant patent is the "Method to improve uniformity of chemical mechanical polishing planarization." This method enhances the results of the chemical mechanical polishing (CMP) process by implanting a species, such as Si, Ge, As, B, P, H, He, Ne, Ar, Kr, Xe, and C, onto the surface. The implanted species can influence dishing, erosion, and polishing rates during the CMP process, with the ability to either accelerate or decelerate the process based on the selected species and varying doses.
Career Highlights
Thirumal Thanigaivelan is currently employed at Varian Semiconductor Equipment Associates, Inc., where he continues to develop innovative solutions in semiconductor technology. His work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Thanigaivelan collaborates with talented professionals in his field, including Deepak Arabagatte Ramappa and Christopher R Hatem. These collaborations foster an environment of innovation and creativity, leading to advancements in semiconductor technology.
Conclusion
Thirumal Thanigaivelan is a distinguished inventor whose contributions to semiconductor technology are noteworthy. His patents reflect a commitment to improving device performance and manufacturing processes. His work continues to influence the semiconductor industry positively.