Location History:
- Yokohama, JP (1992 - 1997)
- Utsunimiya, JP (1998)
- Tochigi, JP (2003 - 2009)
- Utsunomiya, JP (1998 - 2012)
Company Filing History:
Years Active: 1992-2012
Title: Inventor Spotlight: Tetsuya Mori from Tochigi, Japan
Introduction
Tetsuya Mori is an accomplished inventor based in Tochigi, Japan, known for his innovative contributions to the field of optical technology. With a remarkable portfolio of 15 patents, Mori has made significant strides in the development of exposure apparatuses and device manufacturing methods, showcasing his expertise and creativity in the realm of engineering.
Latest Patents
Mori's latest patents include groundbreaking inventions that enhance the functionality of exposure apparatuses. One of his notable patents, titled "Exposure Apparatus and Device Manufacturing Method," describes an exposure apparatus equipped with an image sensor and a measurement optical system. This system is designed to guide measurement light in a way that allows for precise calculation of surface position information of substrates. By analyzing the interval between the images formed by measurement light, Mori's invention ensures high accuracy in device manufacturing processes.
Another of his significant patents, "Exposure Apparatus and Device Fabrication Method Using the Same," features an innovative design that includes an original-form stage and a projection optical system. The detection optical system included in this invention enables the detection of positions at multiple points on the original form, enhancing the precision and efficiency of exposure techniques.
Career Highlights
Throughout his career at Canon Kabushiki Kaisha, Tetsuya Mori has established himself as a leading figure in optical technology. His work has not only advanced the capabilities of exposure apparatuses but has also had a lasting impact on the technology and fabrication methods used in various industries. His dedication to research and innovation is evident in the quality and utility of his patented inventions.
Collaborations
Mori has collaborated with esteemed colleagues, including Akiyoshi Suzuki and Eiichi Murakami, further enriching his work with diverse perspectives and expertise. These collaborations have allowed him to tackle complex challenges in device manufacturing and enhance the overall innovation process at Canon.
Conclusion
In conclusion, Tetsuya Mori's contributions to the field of optical technology are notable and impactful. His 15 patents reflect a deep commitment to innovation, addressing real-world challenges in device manufacturing. As he continues to advance the boundaries of technology at Canon, Mori remains a significant figure in the world of patents and inventions, inspiring future generations of inventors.