The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 1999
Filed:
Apr. 10, 1996
Tetsuya Mori, Utsunomiya, JP;
Masao Kosugi, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A projection exposure apparatus includes an illumination optical system for illuminating a first object with exposure light, a projection optical system for projecting a pattern of the first object, illuminated by the exposure light from the illumination optical system, onto a second object, an alignment optical system for illuminating the second object with alignment light, having a wavelength different from the exposure light, and for detecting the alignment light from the second object through the projection optical system, and a moving device for placing the first object on the path of the alignment light when the projection optical system projects the pattern of the first object onto the second object by the exposure light, and for placing the first object out of the path of the alignment light when the alignment optical system detects the alignment light.