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For the Inventor, By the Inventor

Yamanashi, Japan

Tetsushi Ozaki

USPTO Granted Patents = 4

Average Co-Inventor Count = 4.1

ph-index = 2

Forward Citations = 10(Granted Patents)


Location History:

  • Kai, JP (2009)
  • Nirasaki, JP (2012)
  • Yamanashi, JP (2016 - 2018)

Company Filing History:

goldMedal4 out of 10,295 
 
Tokyo Electron Limited
 patents

Years Active: 2009-2018

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4 patents (USPTO):
1. 10133265 - Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends (2018-11-20),
2. 9405289 - Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends (2016-08-02),
3. 8129775 - Semiconductor device and method of manufacturing the same (2012-03-06),
4. 7615163 - Film formation apparatus and method of using the same (2009-11-10),
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