Location History:
- Kai, JP (2009)
- Nirasaki, JP (2012)
- Yamanashi, JP (2016 - 2018)
Company Filing History:
Years Active: 2009-2018
Title: Tetsushi Ozaki: Innovator in Semiconductor Contamination Analysis
Introduction
Tetsushi Ozaki is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of particle contamination analysis. With a total of 4 patents to his name, Ozaki's work has had a substantial impact on improving manufacturing processes.
Latest Patents
One of Ozaki's latest patents is titled "Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends." This innovative system and method are designed to autonomously trace the causes of particle contamination during semiconductor manufacturing. The contamination analysis system analyzes tool process logs alongside particle contamination data from multiple process runs. It determines the relationship between systematic particle contamination levels and various tool parameters. This relationship is crucial for predicting expected contamination levels associated with regular tool usage and identifying which parameters significantly impact these levels. Additionally, the system can identify process logs that show unexpected deviant particle contamination levels, tracing the causes back to specific process log parameter events.
Career Highlights
Tetsushi Ozaki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at this organization has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor manufacturing technology.
Collaborations
Ozaki has collaborated with notable colleagues, including Aaron Archer Waterman and Yuichiro Morozumi. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Tetsushi Ozaki's contributions to semiconductor contamination analysis exemplify the importance of innovation in manufacturing processes. His patents and collaborative efforts continue to shape the future of the semiconductor industry.