Company Filing History:
Years Active: 2016-2025
Title: Tetsuro Itagaki: Innovator in Electrostatic Devices
Introduction
Tetsuro Itagaki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of electrostatic devices, holding a total of 10 patents. His work has been instrumental in advancing technologies that are crucial for various applications in the semiconductor industry.
Latest Patents
Among his latest innovations is the electrostatic chuck device. This device features an electrostatic chuck plate with a dielectric substrate that has a placement surface for wafers. It includes an adsorption electrode positioned within the dielectric substrate, a metal base for support, and a focus ring that surrounds the placement surface. The design allows for effective adsorption of wafers, enhancing the efficiency of semiconductor manufacturing processes.
Another notable invention is the wafer support device, which comprises a dielectric substrate and an RF electrode. The RF electrode is divided into multiple zone electrodes arranged in a planar direction. This device includes a short-circuit member that interconnects the zone electrodes and a main power supply rod connected from the back side of the dielectric substrate. These innovations reflect Itagaki's commitment to improving wafer handling and processing technologies.
Career Highlights
Tetsuro Itagaki is currently employed at Sumitomo Osaka Cement Co., Ltd. His role in the company has allowed him to focus on research and development in electrostatic devices, contributing to the company's reputation as a leader in the industry. His expertise and innovative mindset have led to the successful development of several key technologies.
Collaborations
Throughout his career, Itagaki has collaborated with talented individuals such as Syunsuke Suma and Gaku Fujihashi. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Tetsuro Itagaki is a distinguished inventor whose work in electrostatic devices has significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his dedication to advancing technology and improving manufacturing processes.