Sumitomo Osaka Cement Co., Ltd.

Tetsuro Itagaki

Syunsuke Suma

Gaku Fujihashi

Masaki Hirayama

Teppei Yakubo

Tsutomu Nozoe

Tadashi Neya

Hirokazu Matsushita

Norito Morishita

Yoshiki Kusahara

An electrostatic chuck device includes: an electrostatic chuck plate having a dielectric substrate having a placement surface on which a wafer is placed and an adsorption electrode positioned in the dielectric substrate; a metal base supporting the electrostatic chuck plate from a back surface side opposite to the placement surface; and a focus ring installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface. The electrostatic chuck plate has a ring adsorption region which is adsorbed to the focus ring and is located on a surface positioned on the same side as the placement surface and has a base adsorption region which is adsorbed to the metal base and located on a back surface opposite to the placement surface.

Electrostatic chuck device

A wafer support device includes a dielectric substrate and an RF electrode provided in the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arranged in a planar direction of the dielectric substrate. The wafer support device has: a short-circuit member interconnecting the plurality of zone electrodes; and a main power supply rod connected to the short-circuit member from a back side of the dielectric substrate.

Wafer support device

A titanium oxide powder of the present invention has a BET specific surface area of 5 m/g or more and 15 m/g or less and contains polyhedral-shaped titanium oxide particles having eight or more faces, in which a mass reduction rate in a case of being heated at 800&#xb0; C. for 1 hour in an air atmosphere is 0.03% by mass or more and 0.5% by mass or less.

Titanium oxide powder, and dispersion and cosmetic using said powder

In an ultraviolet-shielding particle coated with silicon oxide of the present invention, a surface of the ultraviolet-shielding particle is coated with a silicon oxide coat, at least one functional group selected from the group consisting of an alkyl group, an alkenyl group, and a cycloalkyl group is present on a surface of the silicon oxide coat, and a content of the functional group is 0.0001% by mass or more and 0.30% by mass or less.

Ultraviolet-shielding particle coated with silicon oxide, aqueous composition containing ultraviolet-shielding particle coated with silicon oxide, and cosmetic

Titanium oxide particles of the present invention include octahedral-shaped particles, in which each particle of the octahedral-shaped particles has line segments each of which connects two apexes which face each other and has a maximum value of the line segments, an average value of the maximum values is 300 nm or more and 1,000 nm or less, and a value (the average value of the maximum values/BET-converted average particle diameter) obtained by dividing the average value of the maximum values of the line segments by an average particle diameter converted from a BET specific surface area is 1.0 or more and 2.5 or less.

Titanium oxide particles, and titanium oxide particle dispersion and cosmetics using same

Zinc oxide coated with silicon oxide of the present invention is zinc oxide which is coated with silicon oxide wherein surfaces of zinc oxide particles are coated with silicon oxide coatings, and the coated zinc oxide particles comprises at least one element selected from a group consisting of Mg, Ca, and Ba.

Zinc oxide which is coated with silicon oxide, method for manufacturing the same, composition which includes the zinc oxide coated with silicon oxide, and cosmetic

Provided are a silicon oxide-coated zinc oxide, a method for producing the same, a composition and a cosmetic including a silicon oxide-coated zinc oxide. The silicon oxide-coated zinc oxide is a silicon oxide-coated zinc oxide formed by coating surfaces of zinc oxide particles with a silicon oxide coat, in which an average particle diameter of the zinc oxide particles is in a range of more than 50 nm and 500 nm or less, and, when an abundance ratio of silicon in the silicon oxide coat in a Qenvironment is indicated by Q, and an abundance ratio in a Qenvironment is indicated by Q, Q+Q&#x2265;0.6 and Q/(Q+Q)&#x2265;0.5 are satisfied.

Silicon oxide-coated zinc oxide, method for producing same, and composition and cosmetic including silicon oxide-coated zinc oxide

Provided are a silicon-oxide-coated zinc oxide capable of suppressing the elution of zinc ions from zinc oxide particles, a method for manufacturing the same, a silicon-oxide-coated-zinc-oxide-containing composition, and a cosmetic. The silicon-oxide-coated zinc oxide is a silicon-oxide-coated zinc oxide formed by coating the surfaces of zinc oxide particles with a silicon oxide coating, in which the average particle diameter of the zinc oxide particles is in a range of 1 nm or more and 50 nm or less, when the abundance ratio of silicon in the silicon oxide coating in a Qenvironment is indicated by Q, and the abundance ratio in a Qenvironment is indicated by Q, Q+Q&#x2267;0.6 and Q/(Q+Q)&#x2267;0.5, and furthermore, the decomposition ratio of Brilliant Blue generated by the photocatalytic activity of the zinc oxide particles is 3% or less.

Silicon-oxide-coated zinc oxide and method for manufacturing same, silicon-oxide-coated-zinc-oxide-containing composition, and cosmetic

Zinc oxide powder of the present invention has a specific surface area which is in a range of 1.5 m/g to 65 m/g, a conductivity which is 150 &#x3bc;S/cm or less and a bulk specific volume which is in a range of 0.5 mL/g to 10 mL/g.

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Tokyo, Japan

Tetsuro Itagaki