Kobe, Japan

Tetsuo Hikawa


Average Co-Inventor Count = 4.6

ph-index = 10

Forward Citations = 336(Granted Patents)


Location History:

  • Takarazuka, JP (1987 - 1991)
  • Kobe, JP (1996 - 2001)
  • Suita, JP (1996 - 2004)

Company Filing History:


Years Active: 1987-2004

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19 patents (USPTO):Explore Patents

Title: The Innovations of Tetsuo Hikawa: A Pioneer in Semiconductor Technology

Introduction: Tetsuo Hikawa, a prominent inventor based in Kobe, Japan, has made significant contributions to the field of semiconductor technology. With a remarkable count of 19 patents, his work focuses on the intricate processes involved in fabricating micromachines using single-crystalline materials.

Latest Patents: Hikawa's latest patents include innovative methods for the manufacturing of semiconductor devices that feature complex structures. His inventive approach emphasizes the irradiation of an uppermost layer of a single-crystalline silicon substrate with Ne atom currents from multiple directions. This process effectively reorients the crystal structure, allowing for the precision creation of micromachines with uniform thickness diaphragms. Specifically, these patents detail how to form V-shaped grooves in substrates using a masking member as a shielding element, demonstrating Hikawa's prowess in enhancing manufacturing techniques.

Career Highlights: Throughout his career, Tetsuo Hikawa has worked with notable companies, including Megachips Corporation. His experience at such esteemed organizations has allowed him to refine his skills and develop groundbreaking technologies in semiconductor fabrication.

Collaborations: In his professional journey, Hikawa has collaborated with esteemed colleagues such as Akira Takata and Takashi Sawada. These partnerships have undoubtedly contributed to the advancement of innovative solutions in micromachine production.

Conclusion: Tetsuo Hikawa stands out as a visionary inventor whose patents have played a crucial role in advancing semiconductor technology. His work not only demonstrates technical expertise but also serves as an inspiration for future innovations in the field. As the demand for sophisticated micromachines continues to grow, Hikawa's contributions will undoubtedly remain relevant and influential.

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