Location History:
- Sasebo, JP (2016)
- Koriyama, JP (2003 - 2018)
Company Filing History:
4 out of 5,966 
2 out of 229 
2 out of 99 
Years Active: 2003-2018
Title: Tetsuji Ueda: Innovator in Titania-Doped Quartz Glass Technology
Introduction
Tetsuji Ueda is a prominent inventor based in Koriyama, Japan, known for his significant contributions to the field of materials science. With a total of nine patents to his name, Ueda has made remarkable advancements, particularly in the development of titania-doped quartz glass, which has applications in extreme ultraviolet (EUV) lithography.
Latest Patents
Ueda's latest patents include innovative methods for creating titania-doped quartz glass. One notable patent describes a method for achieving a high flatness in the glass substrate, which is essential for EUV lithography. The patent specifies that the angle included between a straight line connecting the origin at the center of the reflecting surface to a birefringence measurement point and the fast axis of birefringence should have an average value of more than 45 degrees. This design allows for a concentric distribution of fast axes of birefringence, resulting in a substrate that meets the stringent requirements of EUV lithography. Another patent focuses on selecting titania-doped quartz glass that maintains a reduction in OH group concentration of less than or equal to 100 ppm after heat treatment at 900°C for 100 hours, making it suitable for use in EUV lithography components.
Career Highlights
Throughout his career, Ueda has worked with notable companies, including Shin-Etsu Chemical Co., Ltd. His work has significantly impacted the development of materials used in advanced lithography techniques, contributing to the evolution of semiconductor manufacturing.
Collaborations
Ueda has collaborated with esteemed colleagues such as Akira Fujinoki and Hiroyuki Nishimura. These partnerships have fostered innovation and have been instrumental in advancing the technology surrounding titania-doped quartz glass.
Conclusion
Tetsuji Ueda's contributions to the field of materials science, particularly in the development of titania-doped quartz glass, have positioned him as a key figure in the advancement of EUV lithography technology. His innovative patents and collaborations continue to influence the industry and pave the way for future developments.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.