Tersem Summan

Title: Tersem Summan: Innovator in Carbon Film Deposition Technology

Introduction

Tersem Summan is a prominent inventor based in San Jose, California, who has contributed significantly to the field of material science through his innovative work in carbon film deposition technologies. He holds a total of four patents, showcasing his expertise and dedication to advancing modern industrial processes.

Latest Patents

Among Tersem Summan's latest patents is a notable invention concerning ultra-conformal carbon film deposition. This innovative method involves depositing a sacrificial dielectric layer over a substrate and forming patterned features through the removal of portions of this layer. By introducing a hydrocarbon source, plasma-initiating gas, and dilution gas into a processing chamber, a plasma is generated at a deposition temperature ranging from approximately 80°C to 550°C. This process results in the deposition of a conformal amorphous carbon layer on the patterned features and the exposed upper surface of the substrate. Additionally, the invention outlines a technique for selectively removing the amorphous carbon layer from the upper surfaces, thereby providing intricately filled features within sidewall spacers.

Another important patent by Summan expands on similar methodologies for ultra-conformal carbon film deposition, emphasizing a specified volumetric flow rate ratio of the hydrocarbon source, plasma-initiating gas, and dilution gas during the process. It represents a significant advancement in achieving high-precision carbon film applications, which are crucial for various technological advancements.

Career Highlights

Tersem Summan's professional journey has led him to work at Applied Materials, Inc., a respected company in the semiconductor equipment industry. His contributions have played a vital role in developing innovative solutions aimed at enhancing the manufacturing efficiency and effectiveness of semiconductor devices. His work is characterized by a commitment to research and dedicated problem-solving in advanced materials.

Collaborations

Throughout his career, Tersem has collaborated with notable professionals, including Deenesh Padhi and Shahid Shaikh. These collaborations reflect a strong working environment focused on innovation and excellence in material deposition processes. The synergy among these experts has further propelled the advancement of technology in their field.

Conclusion

In conclusion, Tersem Summan's contributions to carbon film deposition technology exemplify his innovative spirit and dedication to advancing manufacturing processes. With multiple patents to his name and a collaborative approach to his work, he continues to influence the field significantly, ensuring that technological advancements in the semiconductor industry remain at the forefront of research and development.