Company Filing History:
Years Active: 2015
Title: **Innovator Profile: Teng Chao Tao**
Introduction
Teng Chao Tao, based in Saugus, MA, is a notable inventor recognized for his contributions to electrostatic clamping technology. With a focus on enhancing manufacturing processes, he holds a patent that showcases his innovative spirit in this specialized field.
Latest Patents
Tao's single patent is titled "Gas Bearing Electrostatic Chuck." This invention introduces an electrostatic clamp featuring a clamping plate with both a central region and an annulus region. The design incorporates multiple gas supply orifices in the central region that connect to a pressurized gas supply. This configuration allows for the generation of a gas cushion between the clamping surface and the workpiece, enhancing stability during manufacturing operations. Additionally, the gas return orifices provide an exhaust path for the gas cushion, and a seal in the annulus region prevents gas leakage into the external environment. The system is further enhanced with electrodes that are electrically connected to create an effective clamping force.
Career Highlights
Teng Chao Tao is affiliated with Axcelis Technologies, Inc., where he applies his expertise in electrical engineering and advanced manufacturing. His work contributes significantly to the development of technologies that improve productivity and precision in semiconductor fabrication.
Collaborations
Throughout his career, Tao has collaborated with esteemed colleagues including William Davis Lee and Marvin Raymond LaFontaine. Their joint efforts exemplify the collaborative nature of innovation within the engineering community, as they work towards advancing technologies in the semiconductor industry.
Conclusion
Teng Chao Tao's inventive spirit and technical acumen in creating the Gas Bearing Electrostatic Chuck highlight his impactful role in the industry. As engineering challenges continue to evolve, innovators like Tao are essential in driving forward-thinking solutions that enhance manufacturing efficiency and effectiveness.