Axcelis Technologies, Inc.

Teng Chao Tao

William Davis Lee

Samir A Nayfeh

Alexander H Slocum

Ashwin Madhukar Purohit

Joseph Daniel Gillespie

Marvin Raymond LaFontaine

Donovan Beckel

An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.

Gas bearing electrostatic chuck

Growing community of inventors

Saugus, MA, United States of America

Teng Chao Tao