The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Apr. 30, 2008
William David Lee, Boston, MA (US);
Marvin Raymond Lafontaine, Kingston, NH (US);
Ashwin Madhukar Purohit, Gloucester, MA (US);
Joseph Daniel Gillespie, Boston, MA (US);
Donovan Beckel, Wakefield, MA (US);
Teng Chao Tao, Saugus, MA (US);
Alexander Henry Slocum, Bow, NH (US);
Samir Nayfeh, Shrewsbury, MA (US);
William Davis Lee, Boston, MA (US);
Marvin Raymond LaFontaine, Kingston, NH (US);
Ashwin Madhukar Purohit, Gloucester, MA (US);
Joseph Daniel Gillespie, Boston, MA (US);
Donovan Beckel, Wakefield, MA (US);
Teng Chao Tao, Saugus, MA (US);
Alexander Henry Slocum, Bow, NH (US);
Samir Nayfeh, Shrewsbury, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An electrostatic clamp is provided having a clamping plate, wherein the clamping plate has a central region and an annulus region. A plurality of gas supply orifices are defined in the central region of the clamping plate, wherein the plurality of gas supply orifices are in fluid communication with a pressurized gas supply, and wherein the pressurized gas supply is configured to provide a cushion of gas between the clamping surface and the workpiece in the central region of the clamping plate via the plurality of gas supply orifices. One or more gas return orifices defined in one or more of the central region and annulus region of the clamping plate, wherein the one or more gas return orifices are in fluid communication with a vacuum source, therein generally defining an exhaust path for the cushion of gas. A seal is disposed in the annulus region of the clamping plate, wherein the seal is configured to generally prevent a leakage of the cushion of gas from the central region to an environment external to the annulus region. One or more electrodes are further electrically connected to a first voltage potential to provide a first clamping force.