Sherwood, OR, United States of America

Ted Minshall


Average Co-Inventor Count = 8.7

ph-index = 3

Forward Citations = 29(Granted Patents)


Company Filing History:


Years Active: 2016-2021

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7 patents (USPTO):Explore Patents

Title: Ted Minshall: Innovator in Substrate Processing Technology

Introduction

Ted Minshall is a prominent inventor based in Sherwood, Oregon, known for his contributions to substrate processing technology. With a total of 7 patents to his name, Minshall has made significant advancements in the field, particularly in systems designed to enhance the efficiency and effectiveness of plasma processing.

Latest Patents

Among his latest patents, Minshall has developed innovative systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity. One of his notable inventions includes a substrate processing system that features a processing chamber defining a reaction volume. This system incorporates a showerhead designed to introduce gas into the reaction volume, along with a plasma generator that selectively generates RF plasma. Additionally, the design includes a collar that supplies purge gas, effectively reducing parasitic plasma and improving the overall processing quality.

Career Highlights

Minshall's career is marked by his role at Lam Research Corporation, where he has been instrumental in advancing substrate processing technologies. His work has not only contributed to the company's success but has also positioned him as a key figure in the industry.

Collaborations

Throughout his career, Minshall has collaborated with notable colleagues, including Shankar Swaminathan and Frank Loren Pasquale. These collaborations have further enriched his work and led to innovative solutions in substrate processing.

Conclusion

Ted Minshall's contributions to substrate processing technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative systems continue to influence the industry and pave the way for future advancements.

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