Company Filing History:
Years Active: 2013-2014
Title: Innovations by Inventor Ted Li
Introduction
Ted Li is an accomplished inventor based in Sunnyvale, California. He has made significant contributions to the field of semiconductor processing, particularly in the area of photoresist stripping and passivation techniques. With a total of 2 patents to his name, Ted's work has had a notable impact on the industry.
Latest Patents
Ted Li's latest patents include an "Enhanced passivation process to protect silicon prior to high dose implant strip." This invention provides improved methods and apparatus for stripping photoresist and removing ion implant-related residues from a workpiece surface. The process involves exposing the workpiece to a passivation plasma, allowing it to cool, and then using an oxygen-based or hydrogen-based plasma to effectively remove the photoresist and residues. This innovation aims to reduce silicon loss while maintaining an acceptable strip rate.
Another significant patent is the "Low damage photoresist strip method for low-K dielectrics." This invention offers improved methods for stripping photoresist and removing etch-related residues from dielectric materials. The method utilizes a hydrogen-based etch process with a weak oxidizing agent and fluorine-containing compound, while maintaining the substrate temperature at about 160°C or less, ideally below 90°C.
Career Highlights
Ted Li has been associated with Novellus Systems Incorporated, a company known for its advanced semiconductor manufacturing equipment. His work at Novellus has allowed him to develop innovative solutions that enhance the efficiency and effectiveness of semiconductor processing.
Collaborations
Throughout his career, Ted has collaborated with notable colleagues, including David Wingto Cheung and Anirban Guha. These collaborations have contributed to the advancement of technologies in the semiconductor industry.
Conclusion
In summary, Ted Li is a prominent inventor whose work in semiconductor processing has led to valuable innovations. His patents reflect a commitment to improving manufacturing techniques and addressing industry challenges. Ted's contributions continue to influence the field and inspire future advancements.