Location History:
- Fukushima, JP (1993)
- Annaka, JP (2011)
- Tokyo, JP (2015)
- Setagaya-ku, JP (2017 - 2023)
Company Filing History:
Years Active: 1993-2023
Title: Innovations of Tatsuo Enomoto
Introduction
Tatsuo Enomoto is a prominent inventor based in Setagaya-ku, Japan. He has made significant contributions to the field of wafer manufacturing and polishing technologies. With a total of 10 patents to his name, Enomoto's work has had a substantial impact on the semiconductor industry.
Latest Patents
Among his latest innovations is a wire saw apparatus and method for manufacturing wafers. This apparatus includes a plurality of wire guides and a wire row that is designed to travel reciprocatively in an axial direction. It features a nozzle for supplying coolant or slurry, a workpiece-holding portion for suspending a workpiece plate, and a mechanism to adjust the parallelism of the wire guides. This invention allows for the manufacturing of wafers with various warp shapes by controlling the warp in the wire's traveling direction. Another notable patent is a method for conditioning polishing pads. This method involves moving a conditioning head in a radial direction while the polishing pad rotates, allowing for effective conditioning of the entire surface of the pad.
Career Highlights
Tatsuo Enomoto is currently employed at Shin-Etsu Handotai Co., Ltd., a leading company in the semiconductor materials sector. His work at this company has been instrumental in advancing wafer manufacturing techniques.
Collaborations
Enomoto has collaborated with notable colleagues such as Taichi Yasuda and Michito Sato. Their combined expertise has contributed to the development of innovative solutions in the field.
Conclusion
Tatsuo Enomoto's contributions to wafer manufacturing and polishing technologies highlight his role as a key innovator in the semiconductor industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.