The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2017

Filed:

Feb. 17, 2015
Applicant:

Shin-etsu Handotai Co., Ltd., Tokyo, JP;

Inventors:

Taichi Yasuda, Kita-ku, JP;

Tatsuo Enomoto, Setagaya-ku, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/06 (2006.01); H01L 21/683 (2006.01); B24B 41/06 (2012.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B24B 41/06 (2013.01); B25J 15/0658 (2013.01); B25J 15/0666 (2013.01); B25J 15/0683 (2013.01); H01L 21/304 (2013.01);
Abstract

A workpiece holding apparatus, including: a rigid body having a vent; a suction pad adhered onto the lower end face of rigid body and having an opening communicating with vent, being configured to suck and hold a workpiece; an air controlling mechanism communicating with the vent, being configured to aspirate or discharge air through vent to aspirate or discharge air from opening; and a swelling portion being configured to be supplied with air by air controlling mechanism through the vent to swell out at least part of an area of suction pad to be in contact with the workpiece toward the workpiece in detaching workpiece from suction pad; wherein suction pad is configured to suck and hold workpiece by bringing the opening into contact with workpiece while aspirating air by air controlling mechanism through opening, and is configured to detach the workpiece from suction pad by discharging air from opening.


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