Omiya, Japan

Tatsunori Kobayashi


Average Co-Inventor Count = 3.2

ph-index = 4

Forward Citations = 74(Granted Patents)


Location History:

  • Anpachi, JP (1991 - 1992)
  • Omiya, JP (2001 - 2003)

Company Filing History:


Years Active: 1991-2003

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6 patents (USPTO):Explore Patents

Title: Innovations by Tatsunori Kobayashi

Introduction

Tatsunori Kobayashi is a notable inventor based in Omiya, Japan. He has made significant contributions to the field of wafer polishing technology, holding a total of 6 patents. His work focuses on enhancing the efficiency and accuracy of polishing processes, which are crucial in semiconductor manufacturing.

Latest Patents

Kobayashi's latest patents include a wafer-polishing head and a polishing apparatus designed to improve the life of flexible membranes and the precision of wafer polishing. The wafer-polishing head features a principal head with a lower opening that is approximately circular. A flexible membrane is positioned in this opening to hold the wafer securely. The design includes a sealed pressurizing chamber that is controlled by a pressure regulator, ensuring optimal performance.

Additionally, his polishing apparatus consists of multiple polishing and cleaning stations arranged alternately. An arm transfers materials between these stations, equipped with a polishing head that holds the material being polished. The cleaning stations are designed to clean the material in various states, ensuring thorough maintenance of the polishing equipment. The polishing method he developed allows for precise adjustments of the polishing head's position, enhancing the overall polishing process.

Career Highlights

Throughout his career, Tatsunori Kobayashi has worked with Mitsubishi Materials Corporation, where he has applied his innovative ideas to advance polishing technologies. His expertise has significantly impacted the efficiency of semiconductor manufacturing processes.

Collaborations

Kobayashi has collaborated with notable colleagues such as Hiroshi Tanaka and Jiro Kajiwara, contributing to the development of advanced polishing techniques and technologies.

Conclusion

Tatsunori Kobayashi's contributions to wafer polishing technology demonstrate his commitment to innovation in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in polishing processes, making him a key figure in this field.

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