This inventor holds 2 USPTO granted patents. Top assignee: Nuflare Technology, Inc.. Active years: 2009.
Location History:
- Shizuoka, JP (2009)
- Tagata-gun, JP (2009)
Company Filing History:
Years Active: 2009
Title: Tateki Watanabe: Innovator in Charged-Particle Beam Technology
Introduction
Tateki Watanabe is a prominent inventor based in Shizuoka, Japan. He has made significant contributions to the field of charged-particle beam technology, holding a total of 2 patents. His innovative work has advanced the capabilities of charged-particle beam pattern writing methods and apparatus.
Latest Patents
Watanabe's latest patents include a "Charged-particle beam pattern writing method and apparatus" and a "software program for use therein." This invention features an atmospheric pressure measuring unit that measures air pressure, a coordinate value corrector for adjusting three-dimensional coordinate values, and a deflection amount computing unit that calculates the deflection of the charged particle beam. Additionally, it includes an irradiator for the charged particle beam and a deflector that adjusts the beam based on the calculated deflection amount.
Another notable patent is the "Charged beam drawing apparatus and charged beam drawing method." This apparatus incorporates main and sub two-stage deflectors, which divide the main deflection drawing region into sub regions. The main deflector selects one of these sub regions, allowing for precise drawing shots using the sub deflector. The sub deflection driving unit features a sensitivity correction circuit and an astigmatic correction circuit, ensuring high accuracy in the drawing process.
Career Highlights
Watanabe is currently employed at Nuflare Technology, Inc., where he continues to develop innovative technologies in his field. His work has been instrumental in enhancing the performance and efficiency of charged-particle beam systems.
Collaborations
Throughout his career, Watanabe has collaborated with notable colleagues, including Hayato Kimura and Kiyoshi Hattori. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Tateki Watanabe's contributions to charged-particle beam technology exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of the complexities involved in this field, and his work continues to influence advancements in technology.