The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2009
Filed:
Nov. 15, 2006
Kiyoshi Hattori, Tokyo, JP;
Kenji Ohtoshi, Kawasaki, JP;
Tomohiro Iijima, Numazu, JP;
Yoshiaki Onimaru, Numazu, JP;
Hayato Kimura, Numazu, JP;
Tateki Watanabe, Tagata-gun, JP;
Kiyoshi Hattori, Tokyo, JP;
Kenji Ohtoshi, Kawasaki, JP;
Tomohiro Iijima, Numazu, JP;
Yoshiaki Onimaru, Numazu, JP;
Hayato Kimura, Numazu, JP;
Tateki Watanabe, Tagata-gun, JP;
NuFlare Technology, Inc., Numazu-shi, JP;
Abstract
There is provided a charged beam drawing apparatus which includes main/sub two-stage deflectors, divides a main deflection drawing region on a sample into sub deflection drawing regions determined by the deflection width of the sub deflector, selects one of the sub deflection drawing regions by use of the main deflector and draws shots in the selected sub deflection drawing region by use of the sub deflector. A sub deflection driving unit includes a sub deflection sensitivity correction circuit, a sub deflection astigmatic correction circuit, an adder circuit which adds an output of the sub deflection sensitivity correction circuit and an output of the sub deflection astigmatic correction circuit, and a deflection amplifier which additionally applies an output of the adder circuit to the sub deflector.