IDiyas

For the Inventor, By the Inventor

Tokyo, Japan

Takuya Tsushima

USPTO Granted Patents = 8

Average Co-Inventor Count = 2.4

ph-index = 1


Company Filing History:

goldMedal8 out of 2,508 
 
Ebara Corporation
 patents

Years Active: 2018-2024

Loading Chart...
8 patents (USPTO):
1. 12094731 - Substrate drying apparatus (2024-09-17),
2. 12027402 - Substrate processing apparatus and substrate processing method (2024-07-02),
3. 11658058 - Substrate holding apparatus (2023-05-23),
4. 11236434 - Device that holds substrate in substrate holder and/or releases holding of substrate using substrate holder, and plating apparatus including the same (2022-02-01),
5. 11015261 - Substrate holder and plating apparatus (2021-05-25),
6. 10991605 - Substrate processing device, method for controlling substrate processing device, and storage medium storing a program (2021-04-27),
7. 10665495 - Substrate attachment/detachment device, plating device, control device for a substrate attachment/detachment device, and storage medium that stores a program for causing a computer to execute a method of controlling a substrate attachment/detachment device (2020-05-26),
8. 10163672 - Substrate processing device, method for controlling substrate processing device, and storage medium storing programs (2018-12-25),

Title: Takuya Tsushima: Innovator in Substrate Processing Technology

Introduction

Takuya Tsushima is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of eight patents. His innovative work focuses on improving the efficiency and effectiveness of substrate drying and processing methods.

Latest Patents

Among his latest patents is a substrate drying apparatus. This apparatus features a gripping part that holds the outer periphery of a square substrate. It includes a substrate nozzle that ejects gas to dry the substrate and a gripping part nozzle that also ejects gas to ensure thorough drying. The design allows for relative movement of the substrate nozzle and gripping part nozzle in different directions, enhancing the drying process. Another notable patent is for a substrate processing apparatus and method. This invention involves an adjusting system that modifies the arrangement of the substrate based on sensor detection. It ensures that the substrate is accurately positioned before being attached to the substrate holder, thereby improving processing accuracy.

Career Highlights

Takuya Tsushima is currently employed at Ebara Corporation, a leading company in the field of environmental and industrial machinery. His work at Ebara has allowed him to develop and refine his innovative ideas, contributing to the company's reputation for excellence in substrate processing technology.

Collaborations

Throughout his career, Takuya has collaborated with notable colleagues such as Toshio Yokoyama and Tomonori Hirao. These collaborations have fostered a creative environment that encourages the exchange of ideas and advancements in technology.

Conclusion

Takuya Tsushima is a key figure in the realm of substrate processing, with a strong portfolio of patents that reflect his innovative spirit. His contributions continue to shape the industry and enhance the efficiency of substrate processing methods.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…