The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2021
Filed:
Mar. 07, 2017
Ebara Corporation;
Yoshitaka Mukaiyama, Tokyo, JP;
Toshio Yokoyama, Tokyo, JP;
Junitsu Yamakawa, Tokyo, JP;
Takuya Tsushima, Tokyo, JP;
Tomonori Hirao, Tokyo, JP;
Sho Tamura, Tokyo, JP;
Hirotaka Ohashi, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
To provide a substrate holder and a plating apparatus that can easily position a substrate. A substrate holder includes a substrate holding body for holding a substrate, and a first holding member and a second holding member that interpose and hold the substrate holding body therebetween, and the first holding member includes an opening portion through which the plating target surface of the substrate is exposed, and a power supply member configured to be in contact with a plating target surface of the substrate.