The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Aug. 23, 2017
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Junitsu Yamakawa, Tokyo, JP;
Takuya Tsushima, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); C25D 17/00 (2006.01); G01B 11/00 (2006.01); C25D 17/06 (2006.01); C25D 21/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01); C25D 21/12 (2013.01); G01B 11/002 (2013.01);
Abstract
A substrate processing device for processing a substrate, comprising: an image sensor for detecting positions of two corners on at least one diagonal line of a substrate when the substrate is moved to a predetermined position; an illuminating device that can be disposed so as to illuminate the two corners of the substrate on an opposite side of the substrate at the predetermined position to the image sensor; and a control device for determining the position of the substrate, based on the positions of the two corners detected by the image sensor.