Location History:
- Hachioji, JP (2000 - 2004)
- Ebina, JP (2004)
Company Filing History:
Years Active: 2000-2004
Title: The Innovative Contributions of Takeshi Aoki
Introduction
Takeshi Aoki is a prominent inventor based in Hachioji, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on advanced methods for film formation and semiconductor device production.
Latest Patents
Among his latest patents is a method for forming a film by plasma. This innovative process aims to produce a fluorine-containing carbon film, which serves as an interlayer insulator. The invention details how a conductive film, such as a titanium nitride (TiN) film, is formed on the carbon film. After a resist film pattern is created, the TiN film is etched using BCl gas. The process involves irradiating the wafer's surface with oxygen plasma, which chemically etches the carbon film and the resist film. The TiN film acts as a mask, allowing for the formation of predetermined holes. Additionally, the TiN film serves as an adhesion layer for interconnection layers, enhancing the overall functionality of the semiconductor device.
Career Highlights
Takeshi Aoki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His expertise and innovative approaches have positioned him as a key figure in the development of advanced semiconductor technologies.
Collaborations
Some of his notable coworkers include Takashi Akahori and Risa Nakase. Their collaborative efforts contribute to the ongoing advancements in semiconductor research and development.
Conclusion
Takeshi Aoki's contributions to semiconductor technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of semiconductor devices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.