Location History:
- Koshi, JP (2018)
- Kumamoto, JP (2014 - 2023)
Company Filing History:
Years Active: 2014-2025
Title: Takashi Uno: Innovator in Substrate Processing Technology
Introduction
Takashi Uno is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 6 patents. His innovative work focuses on improving the efficiency and effectiveness of substrate processing systems.
Latest Patents
Uno's latest patents include a substrate processing system and a substrate processing method. The substrate processing system is designed to process a combined substrate, which consists of a first substrate and a second substrate bonded together. This system features a first modifying apparatus that creates an internal modification layer within the first substrate, extending from the center toward the edge. Additionally, a second modifying apparatus forms an edge modification layer along the boundary between the edge and central portions of the first substrate. The system also includes a separating apparatus that removes a portion of the first substrate from the rear surface, starting from the internal modification layer.
Another notable patent is the substrate processing apparatus, which processes a combined substrate with a device layer on the first substrate. This apparatus includes a holder for the second substrate's rear surface, a processing unit for the first substrate, and two processing liquid supplies. The first supply etches the front surface of the first substrate, while the second removes metal contaminants from the rear surface of the second substrate.
Career Highlights
Takashi Uno is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop and refine his innovative substrate processing technologies.
Collaborations
Uno has collaborated with notable colleagues, including Hirotaka Maruyama and Yasuo Kiyohara. These partnerships have contributed to the advancement of substrate processing technologies and have fostered a collaborative environment for innovation.
Conclusion
Takashi Uno's contributions to substrate processing technology have established him as a key figure in the field. His innovative patents and work at Tokyo Electron Limited continue to influence the industry and drive advancements in substrate processing systems.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.