Takashi Sato

Title: Takashi Sato: Innovator in Plasma Processing Technologies

Introduction

Takashi Sato is an esteemed inventor based in Miyagi, Japan. With a remarkable portfolio of nine patents, he has made significant contributions to the field of plasma processing technology. His innovative spirit and technical expertise have positioned him as a notable figure in the industry.

Latest Patents

Takashi Sato's latest patents showcase his advancements in plasma processing apparatuses and methods. One of his notable inventions is a plasma processing apparatus that consists of a chamber, a substrate support with a lower electrode, an electrostatic chuck, a heater, a radio frequency power supply, and a DC power supply. The apparatus features a sophisticated first controller that controls the radio frequency power supply to deliver pulsed power to the lower electrode periodically. This process is designed with a cycle defined by a first frequency, while also managing a pulsed negative voltage applied to the edge ring. Additionally, a second controller is incorporated, equipped with a heater controller that regulates the power based on resistance values obtained from current and voltage samples supplied to the heater.

Another innovation by Sato is a plasma processing apparatus that includes an integrated heater and power frequency control, maintaining similar functionalities as the previously mentioned device. This highlights his commitment to refining and enhancing plasma processing technologies.

Career Highlights

Throughout his career, Sato has worked with major corporations that are at the forefront of technology. He has been associated with prominent companies such as Sony Corporation and Tokyo Electron Limited. His experiences in these notable firms have contributed vastly to his development as an inventor and innovator.

Collaborations

Sato has collaborated with several talented individuals during his professional journey. Notable coworkers include Kengo Saito and Shojiro Kawakami, who have collectively contributed to the advancements in their respective fields.

Conclusion

Takashi Sato stands as a pivotal innovator in plasma processing technology with a track record of nine patents under his name. His work continues to influence the industry positively, paving the way for future advancements. As technology evolves, Sato's contributions will undeniably remain significant in shaping the landscape of plasma processing technologies.