Sony Corporation

Tokyo Electron Limited

Japan Science and Technology Agency

Photonic Lattice, Inc.

Autocloning Technology Ltd.

Takashi Sato

Yutaka Takei

Hiroki Endo

Kengo Saito

Shojiro Kawakami

Kazuhito Yamada

Kenji Abiko

Sadao Watanabe

Isamu Yoshii

Masanori Sato

Toshiyuki Nakagawa

Hiroyuki Ino

Osamu Koizumi

Toshio Kano

Hiroshi Kimura

Shinji Masugi

Takayuki Kawashima

Ikushi Nakashima

Wataru Ishikawa

Hiroshi Kimira

Naoki Hashimoto

Yoshihiro Sasaki

A plasma processing apparatus includes a chamber; a substrate support having a lower electrode, an electrostatic chuck, and a heater; a radio frequency power supply; a DC power supply; a first controller; and a second controller. The first controller controls the radio frequency power supply to supply a pulsed radio frequency power to the lower electrode periodically with a cycle defined by a first frequency, and controls the DC power supply to apply a pulsed negative voltage to the edge ring periodically with the cycle. The second controller includes a heater controller that controls the power by obtaining a resistance value of the heater from sample values of a current and a voltage supplied to the heater. The first frequency is different from a second frequency that is a sampling frequency of the sample value of the current and the sample value of the voltage in the second controller.

Plasma processing apparatus and method

Plasma processing apparatus with heater and power frequency control

A small and high-speed polarization analysis device and ellipsometer having no driving section are provided by overlapping one polarizer array rendered by arranging a plurality of polarizer regions of mutually different optical axis directions in the form of stripes and one wavelength plate array rendered by arranging a plurality of wavelength plate regions of fixed retardation and mutually different optical axis directions in the form of stripes so that the respective stripes of the plurality of polarizer regions and of the plurality of wavelength plate regions intersect one another and by disposing a light-receiving element array so that the intensities of light that has passed through the matrix-like intersection parts can be individually measured. As a method of analyzing a two-dimensional intensity distribution pattern that is observed by the light-receiving element array of the polarization analysis device, either one of (or both of) the algorithms of a method that determines incident polarized waves by mathematically fitting pattern shapes or performing database matching or a method that performs a Fourier transform on pattern shapes and determines incident polarized waves from the frequency components is (are) used. Furthermore, if necessary, more accurate polarization analysis is also possible by adopting a signal processing method that removes signals from light-receiving element regions that receive unnecessary scattered light and diffracted light.

Driverless ellipsometer and ellipsometry

A thin polarizer array and a wavelength plate array that are composed of micro regions having different optical axis directions and wavelength characteristics and having a high extinction ratio and a low insertion loss, and a polarization analyzer using them. An array of micro periodic grooves is formed on a substrate, with the directions changed from one region to another. An alternating multilayer film formed by bias sputtering alternating a layer of high refractive index material such as Si or TaOand a layer of low refractive index material such as SiO. By selecting a condition that each layer maintains its periodic projecting/recessed shape, an array of photonic crystal polarizer is formed. By mounting this array of photonic crystal polarizer in a photodetector array, a polarization analyzer that is small, has no movable part, has a small number of components, and enables high-precision measurement is constituted.

Polarization analyzer

A recording and playback device utilizing magnetic tape, such as a tape cassette, as a recording medium includes a magnetic head arranged to contact one side of the magnetic tape and a stabilizer arranged positioned directly opposed the magnetic head corresponding to the opposite side of the magnetic tape such that the magnetic tape move along a path interposed between the stabilizer and the magnetic head. The stabilizer includes a tape slider surface in contact with the side of the tape opposite the magnetic head contacting side. Further, the tape slider surface of the stabilizer may be formed with a recessed portion and tape surface scraper portions. According to this structure vibration of the magnetic tape in the vicinity of the magnetic head is greatly reduced such that a head servo for control of the magnetic head may accurately position the magnetic head even in devices utilizing a very small track pitch. Also read/write error, tape dropout, and the like, due to foreign matter entering the tape path, is reliably prevented. Further, space between the magnetic tape and the head is reduced and contact pressure between the head and the tape is maintained to optimize recording and or playback operations between the head and the magnetic tape.

Magnetic tape stabilizer for a recording and playback device

A magnetic head device has a base portion 3, and a magnetic head element 4 protuberantly formed on a major surface of the base portion 3 and having a magnetic core with a magnetic gap g. A magnetic tape controller 5 surrounding the magnetic head element 4 and contacted with a magnetic tape 2 is provided on a major surface of the base portion 3. The magnetic tape controller has a magnetic tape attracting aperture 5A for exposing a magnetic tape slide surface 4B of the magnetic head element 4 to outside. The recording/reproducing characteristics for the magnetic tape are stabilized and data errors are prevented from occurring.

Magnetic head apparatus, tape cartridge and recording/reproducing

A modulating method, a modulating device and a demodulating device, in which it is possible to improve the digital sum value (DSV) of the coded information, modulated for transmission or recording on the recording medium, are disclosed. An encoding circuit 11 translates a sequence of input data into a sequence of coded data suitable for transmission. A pattern generating circuit 12 generates a pattern of a pre-set length at a pre-set interval inversely proportionate to the low-range cut-off frequency of the modulated coded data. A pattern inserting circuit 13 inserts the patterns into the sequence of coded data A at the pre-set interval. A modulating circuit 14 NRZI modulates the pattern-interlaced sequence of the coded data B and outputs the resulting sequence. A timing control circuit 15 controls the pattern inserting circuit 13 an so forth. The DSV of the modulated coded data may be controlled by the inserted patterns, while the increase in redundancy may be maintained at a necessary minimum value to adapt the DSV control characteristics to the specifications demanded by the transmission system.

Modulating method, modulating device and demodulating device

A magnetic alloy which contains not less than 0.03 weight percent but not more than 5.0 weight percent of P, not less than 0.01 weight percent but not more than 5.0 weight percent of at least one element of Ti, Nb, and Zr, not less than 2.5 weight percent but not more than 10 weight percent Si and the remaining part consisting mainly of Fe is disclosed. In the alloy, P is segregated on the grain boundaries thereof with a specified amount which results in a superior magnetic characteristics and workability represented by the fact that the alloy can be rolled.

Magnetic alloy

A magnetic alloy which contains not less than 0.03 weight % but not more than 5.0 weight % of P not less than 3.0 weight % but not more than 26.0 weight % of Al and Si totally (where Al is not less than 0.01 weight % but not more than 13.0 weight % and Si is not less than 0.01 weight % but not more than 13.0 weight %), the remaining part of the alloy consists mainly of Fe and the alloy is characterized in that P is presented on the grain boundary thereof with the amount more than 0.5 weight % of the atoms which form said grain boundary.

Growing community of inventors

Miyagi, Japan

Takashi Sato