Location History:
- Fuchu, JP (2002)
- Kikuchi-gun, JP (2004)
- Kumamoto, JP (2005 - 2011)
Company Filing History:
Years Active: 2002-2011
Title: Takashi Aiuchi: Innovator in Substrate Processing Technology
Introduction
Takashi Aiuchi is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His work focuses on improving the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
One of Aiuchi's latest patents is a substrate processing apparatus and carrier adjusting system. The objective of this invention is to facilitate the rapid replacement of parts in a substrate processing apparatus, surpassing the capabilities of prior art. This apparatus consists of multiple component parts designed for specific substrate processing tasks, with identification marks attached to each part. It includes a storage unit for part information, an input unit for ordering components, and a display unit for showing relevant part information based on the inputted identification mark.
Another notable patent is related to a substrate inspecting device, coating/developing device, and substrate inspecting method. This invention involves forming a quadrangular first inspection pattern on a substrate's base film and a second inspection pattern aligned with it. By irradiating light onto these patterns and analyzing the reflected diffracted light, the line width and pitch of the resist pattern can be estimated, enhancing the evaluation process.
Career Highlights
Takashi Aiuchi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in advancing substrate processing technologies.
Collaborations
Aiuchi collaborates with notable coworkers, including Michio Tanaka and Makoto Kiyota. Their combined expertise contributes to the development of cutting-edge technologies in the field.
Conclusion
In summary, Takashi Aiuchi is a distinguished inventor whose work in substrate processing technology has led to significant advancements. His patents reflect a commitment to innovation and efficiency in the industry.