The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Aug. 17, 2007
Takashi Aiuchi, Kumamoto, JP;
Akihito Suzuki, Kumamoto, JP;
Hirotsugu Kamamoto, Kumamoto, JP;
Shuichi Yonemura, Kumamoto, JP;
Takashi Imafu, Kumamoto, JP;
Kazuhisa Sakamoto, Kumamoto, JP;
Takashi Aiuchi, Kumamoto, JP;
Akihito Suzuki, Kumamoto, JP;
Hirotsugu Kamamoto, Kumamoto, JP;
Shuichi Yonemura, Kumamoto, JP;
Takashi Imafu, Kumamoto, JP;
Kazuhisa Sakamoto, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.