Takahiro Sakamoto

Title: Takahiro Sakamoto: Innovator in Substrate Processing Technologies

Introduction

Takahiro Sakamoto is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing methods and apparatus.

Latest Patents

Sakamoto's latest patents include a substrate processing system and a substrate processing method, along with a computer-readable recording medium. The substrate processing method involves thinning a substrate that has a protective tape attached to its front surface. This method includes measuring the thickness of the protective tape and grinding the rear surface of the substrate using a grinder while it is held by a substrate holder. Additionally, he has developed a coating apparatus that enhances film thickness uniformity. This apparatus features a nozzle with a storage chamber for coating liquid and a slit-like flow path that discharges the liquid through a discharge port at the front end. The moving mechanism allows for relative movement between the nozzle and the substrate along the substrate's surface.

Career Highlights

Takahiro Sakamoto is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has positioned him as a key figure in the development of advanced substrate processing technologies.

Collaborations

Sakamoto has collaborated with notable coworkers, including Munehisa Kodama and Takayuki Ishii, contributing to the advancement of their shared projects and innovations.

Conclusion

Takahiro Sakamoto's contributions to substrate processing technologies reflect his dedication to innovation and excellence in his field. His patents and work at Tokyo Electron Limited continue to influence the industry positively.